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[LC/MS] Liquid Chromatography Mass Spectrometry

[LC/MS] Liquid Chromatography Mass Spectrometry

It is an analytical method that detects ions with a detector and performs qualitative and quantitative analysis.

Liquid chromatography (LC) is classified as a type of chromatographic method that separates components of a liquid sample based on chromatographic principles. The detection of the separated components using a mass spectrometer is referred to as liquid chromatography-mass spectrometry (LC/MS). LC/MS is an analytical technique for the qualitative and quantitative analysis of organic compounds. - Effective for analyzing components with relatively large molecular weights or relatively high polarity. - By selecting the ionization method, it can accommodate thermally unstable substances and others. - There are various ionization methods available, allowing detection using the most suitable ionization method for the component (Electrospray Ionization (ESI), Atmospheric Pressure Chemical Ionization (APCI), Atmospheric Pressure Photoionization (APPI)). - High mass resolution can be achieved using mass spectrometers that utilize the Time-of-Flight method.

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Simultaneous analysis of odor components.

Simultaneous analysis of odor components.

Identification of odor components using gas chromatography-mass spectrometry.

Odors are commonly expressed in various ways, such as "fragrance" that gives pleasure and "stench" that causes discomfort. Odors rarely exist as a single type of odor component; instead, they are typically a mixture of various odor components. To visualize these complex odors, instrumental analysis using gas chromatography-mass spectrometry (GC/MS) is effective. This document introduces the flow of odor component analysis and presents a case study of simultaneous analysis of unpleasant odors.

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Differences in detected components by ionization methods ESI and APCI.

Differences in detected components by ionization methods ESI and APCI.

LC/MS: Liquid Chromatography-Mass Spectrometry

The ionization method for LC/MS is commonly ESI (Electrospray Ionization). In ESI, if low-polarity components cannot be ionized, APCI (Atmospheric Pressure Chemical Ionization) is available as a highly sensitive detection method. It is important to choose the optimal ionization method according to the target components in order to obtain data that aligns with the objectives.

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[Analysis Case] Structural Analysis of Positive-Type Photoresist

[Analysis Case] Structural Analysis of Positive-Type Photoresist

Structural analysis of photosensitizers is possible using thermal decomposition GC/MS method.

Positive-type photoresists are widely used as photolithography materials in semiconductor device manufacturing. The materials used in the resist vary significantly depending on the exposure light source, but for g-line and i-line resists, phenolic novolak resin is generally used as the base resin, and naphthoquinone diazide compounds are used as the photosensitizer. This case study introduces an example where naphthoquinone diazide compounds were decomposed using thermal decomposition GC/MS method to estimate the structure of the parent nucleus.

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Evaluation methods for organic compounds in clean rooms

Evaluation methods for organic compounds in clean rooms

GC/MS: Gas Chromatography-Mass Spectrometry

In clean rooms where the manufacturing of semiconductors and liquid crystals takes place, it is important to monitor not only particles but also molecular-level chemical contamination (molecular contamination). Floating molecular contaminants include acidic and basic gases, cohesive organic substances, dopants, and metals, and the analysis methods vary depending on the components. Here, we will introduce details about cohesive organic substances and the representative collection methods, "adsorbent collection" and "wafer exposure collection."

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[Analysis Case] Qualitative Analysis of Fluorinated Gases

[Analysis Case] Qualitative Analysis of Fluorinated Gases

Qualitative analysis of specific freons (CFC/HCFC) and alternative freons (HFC) is possible.

Freon gases are utilized in various applications such as refrigerants, foaming agents, semiconductors, and cleaning agents for precision parts due to their chemically stable nature and minimal impact on human health. On the other hand, they are substances that contribute to ozone layer depletion and global warming, which is why they are regulated by law. In this case, Freon gases were analyzed using GC/MS, and the separation analysis of CF4, which has low polarity and is difficult to separate among PFCs, was conducted. By using GC/MS, it is possible to qualitatively analyze specific Freons such as CFCs, HCFCs, and alternative Freons like HFCs and PFCs.

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  • Environmental Analysis

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